Continuum model of shot noise and line edge roughness
- G.M. Gallatin
- 2001
- Microelectronic and MEMS Technologies 2001
Conference paper
Publications
14462 results for Physical Sciences
Simulation enabled decision making in advanced lithographic manufacturing
- C. Progler
- 2001
- Microelectronic and MEMS Technologies 2001
Conference paperGreen’s tensor technique for scattering in two-dimensional stratified media
- Michael Paulus
- Olivier J. F. Martin
- 2001
- Physical Review E - Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics
PaperChemical mapping of patterned polymer photoresists by near-field infrared microscopy
- Bogdan Dragnea
- Jan Preusser
- et al.
- 2001
- Applied Surface Science
PaperBurstein-Moss shift of n-doped (formula presented)
- Martín Muñoz
- Fred H. Pollak
- et al.
- 2001
- Physical Review B - CMMP
PaperStresses and first-order dislocation energetics in equilibrium Stranski-Krastanow islands
- B.J. Spencer
- J. Tersoff
- 2001
- Physical Review B - CMMP
PaperAcceleration in nitroxide mediated 'living' free radical polymerizations
- E. Harth
- B. Van Horn
- et al.
- 2001
- Chemical Communications
PaperA 10 nm MOSFET concept
- J. Appenzeller
- R. Martel
- et al.
- 2001
- Microelectronic Engineering
PaperWear of ultrathin carbon overcoat characterized by microwear scan and Auger electron spectroscopy
- Tsai-Wei Wu
- Vaughn Deline
- et al.
- 2001
- Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
PaperDesigning porous low-k dielectrics
- Josh H. Golden
- Craig J. Hawker
- et al.
- 2001
- Semiconductor International
Paper