Opportunities and challenges in ultra low k dielectrics for interconnect applications
- S. Purushothaman
- S.V. Nitta
- et al.
- 2001
- Technical Digest-International Electron Devices Meeting
Paper
Publications
14462 results for Physical Sciences
CAMEL: Concept Annotated iMagE Libraries
- Apostol (Paul) Natsev
- Atul Chadha
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperThermally stable ultra-thin Zr silicate for CMOS applications
- Z. Luo
- T.P. Ma
- et al.
- 2001
- International Symposium on VLSI Technology, Systems, and Applications, Proceedings
PaperContrast mechanisms in high-resolution contact lithography: A comparative study
- Michael Paulus
- Heinz Schmid
- et al.
- 2001
- Microelectronic Engineering
PaperQuantum transport in molecular nanowires transistors
- Siegmar Roth
- Marko Burghard
- et al.
- 2001
- Current Applied Physics
PaperEvaluation of molybdenum silicide for use as a 193 nm phase-shifting absorber in photomask manufacturing
- M. Hibbs
- M. Ushida
- et al.
- 2001
- Proceedings of SPIE- The International Society for Optical Engineering
PaperThe e-seminar lecture recording and distribution system
- Arnd Steinmetz
- Martin Kienzle
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperSynchrotron x-ray diffraction and transmission electron microscopy studies of interfacial reaction paths and kinetics during annealing of fully-002-textured Al/TiN bilayers
- J.-S. Chun
- J.R.A. Carlsson
- et al.
- 2001
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperDynamic studies of semiconductor growth processes using in situ electron microscopy
- Frances M. Ross
- 2001
- MRS Bulletin
PaperLayout and language: An efficient algorithm for detecting text blocks based on spatial and linguistic evidence
- Matthew Hurst
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Paper