Optimum mask and source patterns to print a given shape
- Alan E. Rosenbluth
- Scott Bukofsky
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Paper
Publications
14467 results for Physical Sciences
On reactive diffusion: 1 Kinetics, growth and diffusion, 2 equilibrium?
- F.M. D'Heurle
- P. Gas
- et al.
- 2001
- Defect and Diffusion Forum
PaperGrading interfaces - A new concept to improve device performance in organic multilayer light-emitting diodes
- H. Riel
- S. Barth
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperThermomechanical formation and thermal sensing of nanometer-scale indentations in PMMA thin films for parallel and dense AFM data storage
- Graham L. W. Cross
- Michel Despont
- et al.
- 2001
- Materials Research Society Symposium-Proceedings
PaperCircular dielectric gratings acting as resonators for solid state polymer lasers
- C. Bauer
- H. Giessen
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperExtending the performance of KRS-XE for high throughput electron beam lithography for advanced mask making
- David R. Medeiros
- Karen E. Petrillo
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperDynamic studies of semiconductor growth processes using in situ electron microscopy
- Frances M. Ross
- 2001
- MRS Bulletin
PaperThe effect of surface preparation on the structure and electrical transport in an organic semiconductor
- Laura L. Kosbar
- Christos D. Dimitrakopoulos
- et al.
- 2001
- Materials Research Society Symposium - Proceedings
PaperHigh-Tc SQUID gradiometer for mobile magnetic anomaly detection
- Ted R. Clem
- David J. Overway
- et al.
- 2001
- IEEE TAS
Conference paperTechnology for the fabrication of ultrashort channel metal–oxide–semiconductor field-effect transistors
- J. Knoch
- J. Appenzeller
- et al.
- 2001
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paper