Bottom electrode effects in controlling orientation of lead zirconate titanate films deposited by chemical solution deposition
- Deborah A. Neumayer
- Katherine L. Saenger
- et al.
- 1999
- MRS Proceedings 1999
Conference paper
Publications
14466 results for Physical Sciences
Low temperature hydrogen induced degradation of (Ba,Sr)TiO3 thin film capacitors
- J.D. Baniecki
- C. Parks
- et al.
- 1999
- MRS Proceedings 1999
Conference paperA high reliability Metal Insulator Metal capacitor for 0.18 μm Copper technology
- M. Armacost
- A. Augustin
- et al.
- 2000
- IEDM 2000
Conference paperA new broadband transmission line model for accurate simulation of dispersive interconnects
- J.D. Morsey
- K. Coperich
- et al.
- 2000
- EPTC 2000
Conference paperAtomistic simulation of transonic dislocations
- Jonathan A. Zimmerman
- Farid F. Abraham
- et al.
- 1999
- MRS Proceedings 1999
Conference paperMicro-wear scan test on the carbon overcoats as thin as 6 nm or less
- T.W. Wu
- Thomas W. Scharf
- et al.
- 1999
- MRS Proceedings 1999
Conference paperDislocation forest interactions: simulation and prediction
- L.K. Wickham
- K.W. Schwarz
- et al.
- 1999
- MRS Proceedings 1999
Conference paperSpontaneous magnetic moments in YBa2Cu3O7-δ thin films
- F. Tafuri
- J.R. Kirtley
- 2000
- Physical Review B - CMMP
PaperDetermination of coupled acid catalysis-diffusion processes in a positive-tone chemically amplified photoresist
- F.A. Houle
- W.D. Hinsberg
- et al.
- 2000
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperPlasma-enhanced atomic layer deposition of Ta and Ti for interconnect diffusion barriers
- S.M. Rossnagel
- A. Sherman
- et al.
- 2000
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper