Effective Cu surface pre-treatment for high-reliable 22nm-node Cu dual damascene interconnects with high plasma resistant ultra low-k dielectric (k=2.2)
- F. Ito
- H. Shobha
- et al.
- 2010
- ADMETA 2010
Conference paper
Publications
24902 results for Exploratory Science
Mobile phones for health education in the developing world: SMS as a user interface
- Catalina M. Danis
- Jason B. Ellis
- et al.
- 2010
- ACM DEV 2010
Conference paperAvatars meet meetings: Design issues in integrating avatars in distributed corporate meetings
- N. Sadat Shami
- Li-Te Cheng
- et al.
- 2010
- GROUP 2010
Conference paperStreaming workload generator for testing billing mediation platform in telecom industry
- Eric Bouillet
- Parijat Dube
- 2010
- WSC 2010
Conference paperComparative study of CVD TiN vs. ALD TiN for contact metallization in 32nm node and beyond
- Valli Arunachalam
- Filippos Papadatos
- et al.
- 2010
- ADMETA 2010
Conference paperRisk based access control with uncertain and time-dependent sensitivity
- John A. Clark
- Juan E. Tapiador
- et al.
- 2010
- SECRYPT 2010
Conference paperSparse Markov Net learning with priors on regularization parameters
- Katya Scheinberg
- Irina Rish
- et al.
- 2010
- ISAIM 2010
Conference paperImage selection as a service for cloud computing environments
- Robert Filepp
- Larisa Shwartz
- et al.
- 2010
- SOCA 2010
Conference paperHigh reliability 32 nm Cu/ULK BEOL based on PVD CuMn seed, and its extendibility
- Takeshi Nogami
- Tibor Bolom
- et al.
- 2010
- IEDM 2010
Conference paperVoltage polarity effects in GST-based phase change memory: Physical origins and implications
- A. Padilla
- G.W. Burr
- et al.
- 2010
- IEDM 2010
Conference paper