VLSI-NEMS chip for parallel AFM data storage
- M. Despont
- J. Brugger
- et al.
- 2000
- Sensors and Actuators, A: Physical
Paper
Publications
14462 results for Physical Sciences
Watching chips work: Picosecond hot electron light emission from integrated circuits
- J.A. Kash
- J.C. Tsang
- 2000
- Journal of Crystal Growth
PaperAutocompensating fiber-optic quantum cryptography system based on polarization splitting of light
- Donald S. Bethune
- William P. Risk
- 2000
- IEEE JQE
PaperRing-opening polymerization of 6-hydroxynon-8-enoic acid lactone: Novel biodegradable copolymers containing allyl pendent groups
- D. Mecerreyes
- R.D. Miller
- et al.
- 2000
- J Polym Sci Part A
PaperAll-photoplastic, soft cantilever cassette probe for scanning force microscopy
- G. Genolet
- M. Despont
- et al.
- 2000
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperCharacterization of line width variation
- Alfred K. Wong
- Antoinette F. Molless
- et al.
- 2000
- SPIE Advanced Lithography 2000
Conference paperZernike coefficients: Are they really enough?
- C. Progler
- Alfred K. Wong
- 2000
- SPIE Advanced Lithography 2000
Conference paperSynthesis and lithographic performance of poly-4-hydroxyphenyl ethyl methacrylate based negative resists
- J. Gelorme
- L.L. Kosbar
- et al.
- 2000
- Microlithography 2000
Conference paper193 nm positive tone bilayer resist based on norbornene-maleic anhydride copolymers
- R. Sooriyakumaran
- D. Fenzel-Alexander
- et al.
- 2000
- Microlithography 2000
Conference paperToward controlled resist line edge roughness: Material origin of line edge roughness in chemically amplified positive-tone resists
- Q. Lin
- R. Sooriyakumaran
- et al.
- 2000
- Microlithography 2000
Conference paper