Advanced metallization developments for 32-nm node CMOS technology contact architecture
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- et al.
- 2009
- ADMETA 2009
Conference paper
Publications
24861 results for Exploratory Science
UV curing-induced photoresist poisoning in advanced ULK BEOL integration schemes
- Y.C. Ee
- D. Kioussis
- et al.
- 2009
- ADMETA 2009
Conference paperA decision theoretic approach to data leakage prevention
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- Mudhakar Srivatsa
- et al.
- 2010
- SocialCom/PASSAT 2010
Conference paperCoWP metal caps for reliable 32 nm 1X Cu interconnects in porous ULK (k=2.4)
- E. Huang
- M. Oh
- et al.
- 2009
- ADMETA 2009
Conference paperElectron-electron separation in molecular hydrogen
- M.P. Barnett
- F.W. Birss
- et al.
- 2010
- Molecular Physics
PaperA new method to reconstruct recombination events at a genomic scale
- Marta Melé
- Asif Javed
- et al.
- 2010
- PLoS Computational Biology
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- Lian Yu
- Wei-Tek Tsai
- et al.
- 2010
- SOSE 2010
Conference paperThe role of high work-function metallic nanodots on the performance of a-Si:H solar cells: Offering ohmic contact to light trapping
- Jeehwan Kim
- Ahmed Abou-Kandil
- et al.
- 2010
- ACS Nano
PaperLength scaling of carbon nanotube transistors
- Aaron D. Franklin
- Zhihong Chen
- 2010
- Nature Nanotechnology
PaperSputtering behavior and evolution of depth resolution upon low energy ion irradiation of GaAs
- Marinus Hopstaken
- Michael Gordon
- et al.
- 2010
- Journal of Vacuum Science and Technology B
Paper