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- 2012
- ACM TOMS
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Publications
26923 results for Science
Effective Cu surface pre-treatment for high-reliable 22 nm-node Cu dual damascene interconnects with high plasma resistant ultra low-k dielectric (k = 2.2)
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- H. Shobha
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- Heinz Schmid
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- E.T. Ryan
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- 2012
- Microelectronic Engineering
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- C.-C. Yang
- P. Flaitz
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- 2012
- Microelectronic Engineering
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- Chuan Yang
- Amalina B. Ebrahim Attia
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- G.A. Antonelli
- G. Jiang
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- 2012
- Microelectronic Engineering
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- Filippos Papadatos
- Keith Wong
- et al.
- 2012
- Microelectronic Engineering
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- Niv Buchbinder
- Liane Lewin-Eytan
- et al.
- 2012
- IEEE/ACM TON
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- Hanghang Tong
- et al.
- 2012
- Frontiers of Computer Science in China
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