Investigation of deep UV resists by NMR: Residual casting solvents, chemistries, and PAG decomposition in film
- Hiroshi Ito
- Mark Sherwood
- 1999
- J. Photopolym. Sci. Tech.
Paper
Publications
14466 results for Physical Sciences
Factors controlling pattern formation in chemically amplified resists at sub-100 nm dimensions
- W.D. Hinsberg
- F.A. Houle
- et al.
- 1999
- J. Photopolym. Sci. Tech.
PaperMagnetic imaging of the paramagnetic Meissner effect in the granular high-Tc superconductor Bi2Sr2CaCu2Ox
- J.R. Kirtley
- A.C. Mota
- et al.
- 1999
- Journal of Physics Condensed Matter
PaperInvestigation of slider surfaces after wear using photoemission electron microscopy
- Simone Anders
- Thomas Stammler
- et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperInfluence of oxygen stoichiometry on electrical transport and magnetic properties of doped perovskite-type ferrate and manganate single crystals
- T. Maeder
- J.G. Bednorz
- 1999
- Journal of the European Ceramic Society
PaperDiffusion and distribution studies of photoacid generators: Ion beam analysis in lithography
- Narayan Sundararajan
- Christopher F. Keimel
- et al.
- 1999
- J. Photopolym. Sci. Tech.
PaperPinning centres in YBa2Cu3O7- delta films
- J. Mannhart
- D. Anselmetti
- et al.
- 1999
- Supercond Sci Technol
PaperAn NMR study on polycondensation reactions of 3,5-diamino-1,2,4-triazole with dianhydrides and diacyl chlorides
- H. Chang
- K. Kim
- et al.
- 1999
- Macromolecular Chemistry and Physics
PaperUltrathin nitrided gate dielectrics by plasma-assisted processing
- E. Gusev
- D.A. Buchanan
- et al.
- 1999
- Microelectronic Engineering
PaperDetermination of rotational polarization using 1 + 1′ REMPI: A case study of D2 associative desorption from Cu(111)
- H. Hou
- S.J. Gulding
- et al.
- 1999
- Journal of Electron Spectroscopy and Related Phenomena
Paper