Aids for driving lithography hard: Wafer level process control features
- Emily Fisch
- Reginald Bowley
- et al.
- 2001
- Microlithography 2001
Conference paper
Publications
9289 results for Computer Science
A protocol for load sharing among a cluster of heterogeneous Unix workstations
- Deepak Gupta
- Ashish Gupta
- et al.
- 2001
- CCGrid 2001
Conference paperInspection and repair of EUV
- Emily Fisch
- Louis Kindt
- et al.
- 2001
- SPIE Photomask 2001
Conference paperUsing self-authentication-and-recovery images for error concealment in wireless environments
- Ching-Yung Lin
- Daby Sow
- et al.
- 2001
- ITCom 2001
Conference paperMeasured performance of a refractive Gauss-to-flattop reshaper for deep-UV through near-IR wavelengths
- John A. Hoffnagle
- C. Michael Jefferson
- 2001
- SPIE Optical Science and Technology 2001
Conference paperQ-Eval: Evaluating multiple attribute items using queries
- Vijay S. Iyengar
- Jon Lee
- et al.
- 2001
- ACM Conference on Electronic Commerce 2001
Conference paperUsing volume holograms to search digital databases
- Geoffrey W. Burr
- George Maltezos
- et al.
- 2001
- SPIE Optical Science and Technology 2001
Conference paperA $10 thermal infrared imager
- Philip C.D. Hobbs
- 2001
- Intelligent Systems and Advanced Manufacturing 2001
Conference paperScattered light: The increasing problem for 193 nm exposure tools and beyond
- Kafai Lai
- Chung-Hsi Wu
- et al.
- 2001
- Microlithography 2001
Conference paperModeling the real world for data mining: Granular computing approach
- T.Y. Lin
- Eric Louie
- 2001
- IFSA - NAFIPS 2001
Conference paper