Plasma enhanced chemical vapor deposited silicon nitride as a gate dielectric film for amorphous silicon thin film transistors - A critical review
- Yue Kuo
- 1998
- Vacuum
Review
Publications
14466 results for Physical Sciences
The match score image: A visualization tool for image query refinement
- Lawrence D. Bergman
- Vittorio Castelli
- 1998
- SPIE Photonics West 1998
Conference paperEffects of underlayer on performance of bilayer resists for 248-nm lithography
- Katherina Babich
- Alessandro Callegari
- et al.
- 1998
- Microlithography 1998
Conference paperExtension of 248 nm optical lithography: A thin film imaging approach
- Qinghuang Lin
- Ahmad D. Katnani
- et al.
- 1998
- Microlithography 1998
Conference paperAnatomy-based registration of CT-scan and x-ray fluoroscopy data for intraoperative guidance of a surgical robot
- Andre P. Guéziec
- Peter Kazanzides
- et al.
- 1998
- SPIE Medical Imaging 1998
Conference paperFunctional high-speed characterization and modeling of a six-layer copper wiring structure and performance comparison with aluminum on-chip interconnections
- A. Deutsch
- H. Harrer
- et al.
- 1998
- IEDM 1998
Conference paperLithographic characteristics of 193-nm resists imaged at 193 and 248 nm
- Juliann Opitz
- Robert D. Allen
- et al.
- 1998
- Microlithography 1998
Conference paperIs selective CVD an improvement for the titanium silicide process in sub-quarter micron technology? A phase formation study using x-ray diffraction
- R.A. Roy
- Cryil Cabral Jr.
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperEffective damping for rotating disks at super-critical speeds
- Fu-Ying Huang
- C.D. Mote Jr.
- 2002
- SPIE Smart Structures and Materials 2002
Conference paperIdeas for fast and cheap object capture
- P.C.D. Hobbs
- 1997
- Photonics East 1997
Conference paper