New approaches to production-worthy 193-nm photoresists based on acrylic copolymers
- Thomas I. Wallow
- Robert D. Allen
- et al.
- 1998
- Microlithography 1998
Conference paper
Publications
14466 results for Physical Sciences
S-STIR: Similarity search through iterative refinement
- Chung-Sheng Li
- John R. Smith
- et al.
- 1998
- IS&T/SPIE Electronic Imaging 1998
Conference paperInfluence of charge carrier injection on the device performance of blue organic light-emitting diodes
- Heike Riel
- Horst Vestweber
- et al.
- 1998
- Proceedings of SPIE 1998
Conference paperExperimental investigations of the Sneddon solution and an improved solution for the analysis of nanoindentation data
- J.C. Hay
- G.M. Pharr
- 1998
- MRS Spring Meeting 1998
Conference paperSubstrate designs and contacts for organic light-emitting displays
- E.I. Haskal
- H. Vestweber
- et al.
- 1998
- SPIE Optical Science, Engineering, and Instrumentation 1998
Conference paper25 nm CMOS design considerations
- Y. Taur
- C. Wann
- et al.
- 1998
- IEDM 1998
Conference paperSimulation of dislocation dynamics in the continuum limit
- K.W. Schwarz
- 1998
- MRS Fall Meeting 1998
PaperNonlinear dielectric relaxation of Mn doped polycrystalline (Ba,Sr)TiO3 thin films over the temperature range of 4.2 - 473 K
- J.D. Baniecki
- R.B. Laibowitz
- et al.
- 1998
- MRS Fall Meeting 1998
PaperElectrode structures for integration of ferroelectric or high dielectric constant films in semiconductor devices
- Alfred Grill
- 1998
- MRS Fall Meeting 1998
PaperStability and oxidation behavior of Ir thin film electrodes on Si and SiO2
- K.L. Saenger
- A. Grill
- et al.
- 1998
- MRS Fall Meeting 1998
Conference paper