Characterization of spin -on glasses by microindentation
- E. Simonyi
- K.-W. Lee
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paper
Publications
14462 results for Physical Sciences
Integration issues for diamond like carbon in a copper damascene process flow
- A. Grill
- C.V. Jahnes
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperCorrosion protection of Cu, Fe, Mn and Co surfaces
- J.E.E. Baglin
- A.J. Kellock
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperHigh conductivity gate metallurgy for TFT/LCD's
- P.M. Fryer
- E.G. Colgan
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperReliability and copper interconnections with low dielectric constant materials
- C.-K. Hu
- 1998
- MRS Spring Meeting 1998
Conference paperExtendibility of Cu damascene to 0.1 μm wide interconnections
- C.-K. Hu
- K.Y. Lee
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperElectrical test sites for AMLCD-TFT array process characterization
- E.G. Colgan
- R.J. Polastre
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperStress-corrosion cracking of spin-on glass thin films
- R.F. Cook
- E. Liniger
- 1998
- MRS Spring Meeting 1998
Conference paperIs selective CVD an improvement for the titanium silicide process in sub-quarter micron technology? A phase formation study using x-ray diffraction
- R.A. Roy
- Cryil Cabral Jr.
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperExperimental and theoretical study of structure-dielectric property relationships for polysilsesquioxanes
- Sung Mog Kim
- D.Y. Yoon
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paper