Challenges and progress in x-ray lithography
- Jerome P. Silverman
- 1998
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Publications
14462 results for Physical Sciences
High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS
- H. Lorenz
- M. Despont
- et al.
- 1998
- Sensors and Actuators, A: Physical
PaperPeierls-Holstein dimer model with coherent, squeezed oscillatory trial functions
- H. Morawitz
- P. Reineker
- et al.
- 1998
- Journal of Luminescence
PaperInternal functionalization in hyperbranched polyesters
- M. Trollsås
- J.L. Hedrick
- et al.
- 1998
- J Polym Sci Part A
PaperProspects for Peltier cooling of superconducting electronics
- R.P. Huebener
- C.C. Tsuei
- 1998
- Cryogenics
PaperOn consistency conditions for rotating turbulent flows
- C.G. Speziale
- B.A. Younis
- et al.
- 1998
- Physics of Fluids
PaperSpin and charge dynamics in the hole-doped one-dimensional-chain-ladder composite material Cu NMR/NQR studies
- Masashi Takigawa
- Naoki Motoyama
- et al.
- 1998
- Physical Review B - CMMP
PaperQuantum information is physical
- David P. DiVincenzo
- Daniel Loss
- 1998
- Superlattices and Microstructures
PaperInteraction between gas rarefaction and metal ionization in ionized physical vapor deposition
- S.M. Rossnagel
- 1998
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperForce-detected electron-spin resonance: Adiabatic inversion, nutation, and spin echo
- K. Wago
- D. Botkin
- et al.
- 1998
- Physical Review B - CMMP
Paper