High aspect ratio etching in polymer for microactuator applications
- W.Y. Lee
- J. Gao
- et al.
- 1997
- SPIE Micromachining and Microfabrication 1997
Conference paper
Publications
14462 results for Physical Sciences
CMOS image sensors - recent advances and device scaling considerations
- H.-S. Wong
- 1997
- IEDM 1997
Conference paperMask technology for excimer laser projection ablation
- J.L. Speidell
- S. Cordes
- et al.
- 1997
- BACUS Symposium on Photomask Technology and Management 1997
Conference paperConducting polyanilines: properties and applications in microelectronics
- Marie Angelopoulos
- 1997
- Conference on Plastics for Portable and Wireless Electronics 1997
Conference paperTrade-offs in the integration of high performance devices with trench capacitor DRAM
- S.W. Crowder
- S. Stiffler
- et al.
- 1997
- IEDM 1997
Conference paperNovel substrate contact structure for high-Q silicon-integrated spiral inductors
- J.N. Burghartz
- A.E. Ruehli
- et al.
- 1997
- IEDM 1997
Conference paperDiffusion processes in lead based solders used in microelectronic industry
- D. Gupta
- J. Oberschmidt
- 1997
- TMS Annual Meeting 1997
Conference paperUsing scout images to reduce metal artifacts in CT with application to revision total hip surgery
- Alan D. Kalvin
- Bill Williamson
- 1997
- SPIE Medical Imaging 1997
Conference paperASIMM: A framework for automated synthesis of query interfaces for multimedia databases
- Lawrence D. Bergman
- Jerald Schoudt
- et al.
- 1997
- Voice, Video, and Data Communications 1997
Conference paperOptical characterization of attenuated phase shifters
- Alessandro Callegari
- Katherina Babich
- 1997
- SPIE Advanced Lithography 1997
Conference paper