Publications

26858 results for Science

SPRIG: Stackelberg Perception-Reinforcement Learning with Internal Game Dynamics
- - Fernando Martinez
  - Juntao Chen
  - et al.
- 2025
- AAAI 2025
Workshop paper
LLM Assisted Anomaly Detection Service for Site Reliability Engineers: Enhancing Cloud Infrastructure Resilience
- - Nimesh Jha
  - Shuxin Lin
  - et al.
- 2025
- AAAI 2025
Workshop paper
Docling: An Efficient Open-Source Toolkit for AI-driven Document Conversion
- - Nikos Livathinos
  - Christoph Auer
  - et al.
- 2025
- AAAI 2025
Workshop paper
Epistemic Bias as a Means for the Automated Detection of Injustices in Text
- - Kenya Andrews
  - Lamogha Chiazor
- 2025
- AAAI 2025
Workshop paper
Stochastic dynamics of granular hopper flows: A configurational mode controls the stability of clogs
- - David Hathcock
  - Sam Dillavou
  - et al.
- 2025
- Physical Review E
Paper
Consideration on segregation behavior of the surface localization material and the pattern roughness degradation in EUV lithography
- - KwangMo Choi
  - YunJi Kim
  - et al.
- 2025
- SPIE Advanced Lithography 2025
Conference paper
Effect of Composition Uniformity in the Polymer Chain of EUV Photoresist on Lithographic Performance
- - EuiJin Ko
  - YooRim Jang
  - et al.
- 2025
- SPIE Advanced Lithography 2025
Conference paper
The Impact of Polymer Compositional Homogeneity on Lithography and Defects
- - Benjamin D. Rafael-Naab
  - Jong Keun Park
  - et al.
- 2025
- SPIE Advanced Lithography 2025
Conference paper
New Photoacid Generators Designed for Advanced EUV Patterning
- - Kamal P. Pandey
  - Emad Aqad
  - et al.
- 2025
- SPIE Advanced Lithography 2025
Conference paper
New Molecular Resist Design for Advanced Patterning
- - Vageesha Liyana Gunawardana
  - Emad Aqad
  - et al.
- 2025
- SPIE Advanced Lithography 2025
Conference paper