A new positive DUV photoresist optimized for 0.25 μm isolated lines
- T. Lindsay
- G.G. Barclay
- et al.
- 1997
- Microelectronic Engineering
Paper
Publications
14462 results for Physical Sciences
Magnetic tunnel junctions fabricated at tenth-micron dimensions by electron beam lithography
- S. Rishton
- Y. Lu
- et al.
- 1997
- Microelectronic Engineering
PaperA commercially viable 193 nm single layer resist platform
- F.M. Houlihan
- Thomas I. Wallow
- et al.
- 1997
- J. Photopolym. Sci. Tech.
PaperEffect of base electrode on the crystallization and electrical properties of PLT
- A. Grill
- R.B. Laibowitz
- et al.
- 1997
- Integrated Ferroelectrics
PaperA conic primitive-based pattern generator for electron-beam lithography of diffractive optical elements
- H. Rothuizen
- D. Prongué
- et al.
- 1997
- Microelectronic Engineering
PaperA molecular dynamics investigation of rapid fracture mechanics
- Farid F. Abraham
- Dominique Brodbeck
- et al.
- 1997
- Journal of the Mechanics and Physics of Solids
Paper"Living" free radical polymerization of macromonomers: Preparation of well defined graft copolymers
- Craig J. Hawker
- David Mecerreyes
- et al.
- 1997
- Macromolecular Chemistry and Physics
PaperA 400 °C silicon Hall sensor
- Sebastiann In't Hout
- Simon Middelhoek
- 1997
- Sensors and Actuators, A: Physical
PaperAnalysis of a fence-free platinum etch process
- Keith R. Milkove
- Cindy X. Wang
- 1997
- Integrated Ferroelectrics
PaperThe effect of Lewis acid catalysis on the decomposition of CF3OCF3 to COF2 and CF4
- J. Pacansky
- R.J. Waltman
- 1997
- Journal of Fluorine Chemistry
Paper