X-ray lithography: Status, challenges, and outlook for 0.13 μm
- Jerome P. Silverman
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Publications
14468 results for Physical Sciences
Forward recoil spectrometry study of the diffusion of PMDA/ODA-based poly(amic ethyl esters)
- Nancy C. Stoffel
- Sweta Chandra
- et al.
- 1997
- Polymer
PaperInterfacial sliding in Cu/Ta/polyimide high density interconnects as a result of thermal cycling
- D.V. Zhmurkin
- T.S. Gross
- et al.
- 1997
- Journal of Electronic Materials
PaperReaction of polyaniline with NMP at elevated temperatures
- A. Afzali
- Stephen L. Buchwalter
- et al.
- 1997
- Polymer
PaperAggregation and molecular conformation of doped polyaniline in chloroform solution
- Weigong Zheng
- Y. Min
- et al.
- 1997
- Synthetic Metals
PaperThe influence of photoacid structure on the design and performance of 193-nm resists
- Robert D. Allen
- Juliann Opitz
- et al.
- 1997
- J. Photopolym. Sci. Tech.
PaperImage force effects and the dielectric response of SiO2 in electron transport across metal-oxide-semiconductor structures
- H.J. Wen
- R. Ludeke
- et al.
- 1997
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperIntrinsic weak link originating from tilt in contacts between dx2-y2 wave superconductors
- H. Hilgenkamp
- J. Mannhart
- 1997
- Applied Physics A: Materials Science and Processing
PaperAdvances in sensor development and demonstration of superconducting gradiometers for mobile operation
- T.R. Clem
- M.C. Froelich
- et al.
- 1997
- IEEE TAS
PaperOptimization of hybrid JJ/CMOS memory operating temperatures
- D. Gupta
- B. Amrutur
- et al.
- 1997
- IEEE TAS
Paper