Consideration on segregation behavior of the surface localization material and the pattern roughness degradation in EUV lithography
- KwangMo Choi
- YunJi Kim
- et al.
- 2025
- SPIE Advanced Lithography 2025
Conference paper
Publications
26858 results for Science
Accelerated Discovery for a Sustainable Semiconductor Industry
- 2025
- SPIE Advanced Lithography + Patterning 2025
KeynoteThe inherent adversarial robustness of analog in-memory computing
- Corey Lammie
- Julian Büchel
- et al.
- 2025
- Nature Communications
PaperRevealing the Origin and Nature of the Buried Metal-Substrate Interface Layer in Ta/Sapphire Superconducting Films
- Aswin k. Anbalagan
- Rebecca Cummings
- et al.
- 2025
- Advanced Science
PaperTopological materials for microelectronics
- Kai Wagoner-oshima
- Michelle Kelley
- et al.
- 2025
- QMMS 2025
PosterA Route Toward the On-Surface Synthesis of Organic Ferromagnetic Quantum Spin Chains
- Fabian Paschke
- Ricardo Ortiz
- et al.
- 2025
- JACS
PaperDesign and Evaluation of an AI-Assisted Grading Tool for Introductory Programming Assignments: An Experience Report
- Goda Nagakalyani
- Saurav Chaudhary
- et al.
- 2025
- SIGCSE 2025
Conference paperA MACHINE LEARNING APPROACH FOR IDENTIFYING DETERMINANTS OF WNT PROTEIN-PROTEIN INTERACTIONS
- Tiffany Callahan
- Kevin Cheng
- et al.
- 2025
- BPS 2025
TalkStochastic ISTA/FISTA Adaptive Step Search Algorithms for Convex Composite Optimization
- Lam M. Nguyen
- Katya Scheinberg
- et al.
- 2025
- Journal of Optimization Theory and Applications
PaperEmerging Materials and Computing Paradigms for Temporal Signal Analysis
- Teng Zhang
- Stanislaw Wozniak
- et al.
- 2025
- Advanced Materials
Paper