Metallization opportunities and challenges for future back-end-of-the-line technology
- Cyril Cabral Jr.
- Benjamin Fletcher
- et al.
- 2010
- ADMETA 2010
Conference paper
Publications
26883 results for Science
RF performance of short channel graphene field-effect transistor
- Yanqing Wu
- Yu-Ming Lin
- et al.
- 2010
- IEDM 2010
Conference paperStreaming workload generator for testing billing mediation platform in telecom industry
- Eric Bouillet
- Parijat Dube
- 2010
- WSC 2010
Conference paperQuantifying the value of rfid in air cargo handling process: A simulation approach
- Miao He
- Jacqueline Morris
- et al.
- 2010
- WSC 2010
Conference paperSmaller, smarter, faster, and more accurate: The new overlay metrology
- 2010
- SPIE Advanced Lithography 2010
Conference paperCD-SEM metrology of spike detection on sub-40 nm contact holes
- Yoshinori Momonoi
- Taro Osabe
- et al.
- 2010
- SPIE Advanced Lithography 2010
Conference paperProcessing and moisture effects on TDDB for Cu/ULK BEOL structures
- Eric G. Liniger
- T.M. Shaw
- et al.
- 2010
- ADMETA 2010
Conference paperWafer scale fabrication of carbon nanotube FETs with embedded poly-gates
- Shu-Jen Han
- Josephine Chang
- et al.
- 2010
- IEDM 2010
Conference paperHysteretic drain-current behavior due to random telegraph noise in scaled-down FETs with high-κ/metal-gate stacks
- Hiroshi Miki
- Naoki Tega
- et al.
- 2010
- IEDM 2010
Conference paperCoordination in innovative design and engineering: Observations from a lunar robotics project
- Laura A. Dabbish
- Patrick Wagstrom
- et al.
- 2010
- GROUP 2010
Conference paper