Effect of contact implants on the patterning of tungsten damascene interconnects
- J.P. Gambino
- M.A. Jaso
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- 1996
- MRS Spring Meeting 1996
Conference paper
Publications
14462 results for Physical Sciences
Nanofoam porosity measured by infrared spectroscopy and refractive index
- M.I. Sanchez
- J.L. Hedrick
- et al.
- 1996
- MRS Spring Meeting 1996
Conference paperPhase formation in Cu(Sn) alloy thin films
- L. Clevenger
- B. Arcot
- et al.
- 1996
- MRS Spring Meeting 1996
Conference paperElectromigration and diffusion in pure Cu and Cu(Sn) alloys
- C.-K. Hu
- K.L. Lee
- et al.
- 1996
- MRS Spring Meeting 1996
Conference paperLocal and global stress distributions in BEOL metallization
- I.C. Noyan
- E. Liniger
- et al.
- 1996
- MRS Spring Meeting 1996
Conference paperCopper migration and precipitate dissolution in aluminum/copper lines during electromigration testing
- T.M. Shaw
- C.-K. Hu
- et al.
- 1996
- MRS Spring Meeting 1996
Conference paperFaceting of stepped silicon (113) surfaces: Self assembly of nanoscale gratings
- S.G.J. Mochrie
- S. Song
- et al.
- 1996
- Physica B: Condensed Matter
PaperInterfacial roughness of partially correlated metallic multilayers studied by non-specular X-ray reflectivity
- R. Paniago
- H. Homma
- et al.
- 1996
- Physica B: Condensed Matter
PaperOn the reflectivity of polymers: Neutrons and X-rays
- T.P. Russell
- 1996
- Physica B: Condensed Matter
PaperNeutron reflectivity measurements of homopolymer interfaces reinforced with random copolymers
- R. Kulasekere
- H. Kaiser
- et al.
- 1996
- Physica B: Condensed Matter
Paper