Spatial signature in local overlay measurements - "what CD-SEM can tell us and optical measurements can not"
- Scott Halle
- Daniel Moore
- et al.
- 2010
- SPIE Advanced Lithography 2010
Conference paper
Publications
26924 results for Science
3D-AFM enhancement for CD metrology dedicated to lithography sub-28-nm node requirements
- Johann Foucher
- Narender Rana
- et al.
- 2010
- SPIE Advanced Lithography 2010
Conference paperHandling Noisy queries in cross language FAQ retrieval
- Danish Contractor
- Govind Kothari
- et al.
- 2010
- EMNLP 2010
Conference paperProcessing and moisture effects on TDDB for Cu/ULK BEOL structures
- Eric G. Liniger
- T.M. Shaw
- et al.
- 2010
- ADMETA 2010
Conference paperCoordination in innovative design and engineering: Observations from a lunar robotics project
- Laura A. Dabbish
- Patrick Wagstrom
- et al.
- 2010
- GROUP 2010
Conference paperOn the integration of an artifact system and a real-time healthcare analytics system
- Marion Blount
- Carolyn McGregor
- et al.
- 2010
- IHI 2010
Conference paperMobile phones for health education in the developing world: SMS as a user interface
- Catalina M. Danis
- Jason B. Ellis
- et al.
- 2010
- ACM DEV 2010
Conference paperHigh reliability 32 nm Cu/ULK BEOL based on PVD CuMn seed, and its extendibility
- Takeshi Nogami
- Tibor Bolom
- et al.
- 2010
- IEDM 2010
Conference paperSmartDiet: A personal diet consultant for healthy meal planning
- Jen-Hao Hsiao
- Henry Chang
- 2010
- CBMS 2010
Conference paperWireless networks for the smart energy grid: Application aware networks
- Adrian Clark
- Christopher J. Pavlovski
- 2010
- IMECS 2010
Conference paper