CD-SEM metrology of spike detection on sub-40 nm contact holes
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- et al.
- 2010
- SPIE Advanced Lithography 2010
Conference paper
Publications
26924 results for Science
Physical origin of pFET threshold voltage modulation by ge channel ion implantation (GC-I/I)
- Yoshinori Tsuchiya
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- 2010
- IEDM 2010
Conference paperMobile phones for health education in the developing world: SMS as a user interface
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- Jason B. Ellis
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- 2010
- ACM DEV 2010
Conference paperResist-based polarization monitoring with phase-shift masks at 1.35 numerical aperture: Tool-to-tool comparison
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- 2010
- SPIE Advanced Lithography 2010
Conference paperTransforming value perception in music information systems
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- 2010
- AMCIS 2010
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- 2010
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Conference paperReal Java applications in software transactional memory
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- Rei Odaira
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- 2010
- IISWC 2010
Conference paperRF performance of short channel graphene field-effect transistor
- Yanqing Wu
- Yu-Ming Lin
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- 2010
- IEDM 2010
Conference paperAn efficient approach to detect lack of synchronization in acyclic workflow graphs
- Cédric Favre
- 2010
- ZEUS 2010
Conference paperWe are all lurkers: Consuming behaviors among authors and readers in an enterprise file-sharing service
- Michael Muller
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- 2010
- GROUP 2010
Conference paper