Publications

14466 results for Physical Sciences

Fluorocarbon high density plasmas. VII. Investigation of selective SiO₂-to-Si₃N₄ high density plasma etch processes
- - Ying Zhang
  - Gottlieb S. Oehrlein
  - et al.
- 1996
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
XPS analysis of fluorinated polyimides
- - L.P. Buchwalter
- 1996
- Journal of Adhesion Science and Technology
Paper
Electron beam technology - SEM to microcolumn
- - T.H.P. Chang
  - M.G.R. Thomson
  - et al.
- 1996
- Microelectronic Engineering
Paper
Mass sensitive detection of carbon dioxide by amino group-functionalized polymers
- - Rongnong Zhou
  - Dieter Schmeisser
  - et al.
- 1996
- Sensors and Actuators, B: Chemical
Paper
Electron transport in the quantum hall regime in strained si/sige
- - K. Ismail
- 1996
- Physica B: Condensed Matter
Paper
Fermi surface and extended van Hove singularity in the non-cuprate layered perovskite superconductor Sr₂RuO₄
- - D.H. Lu
  - M. Schmidt
  - et al.
- 1996
- Journal of Low Temperature Physics
Paper
High resolution electron beam lithography using ZEP-520 and KRS resists at low voltage
- - D.M. Tanenbaum
  - C.W. Lo
  - et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Defeating tradeoffs for nonlinear optical materials
- - Christopher R. Moylan
  - I.-Heng Mccomb
  - et al.
- 1996
- Molecular Crystals and Liquid Crystals Science and Technology Section A: Molecular Crystals and Liquid Crystals
Paper
Stationary properties of high-critical-temperature proximity effect Josephson junctions
- - K.A. Delin
  - A.W. Kleinsasser
- 1996
- Supercond Sci Technol
Paper
Image placement errors in x-ray masks induced by changes in resist stress during electron-beam writing
- - R.E. Acosta
  - Denise Puisto
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper