Image placement errors in x-ray masks induced by changes in resist stress during electron-beam writing
- R.E. Acosta
- Denise Puisto
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Publications
14468 results for Physical Sciences
Low-temperature magnetic resonance force detection
- K. Wago
- O. Züger
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperCurrent-driven excitation of magnetic multilayers
- J.C. Slonczewski
- 1996
- Journal of Magnetism and Magnetic Materials
PaperThe electrostatic moving objective lens and optimized deflection systems for microcolumns
- M.G.R. Thomson
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperHigh-Tc SQUIDs fabricated by inhibiting ion implantation
- Q.Y. Ma
- S.H. Hong
- et al.
- 1996
- Supercond Sci Technol
PaperDevelopment of 111 texture in Al films grown on SiO2/Si(001) by ultrahigh-vacuum primary-ion deposition
- Y.W. Kim
- I. Petrov
- et al.
- 1996
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperThin, high atomic weight refractory film deposition for diffusion barrier, adhesion layer, and seed layer applications
- S.M. Rossnagel
- C. Nichols
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperTolane oligomers: Model thermotropic liquid crystals
- Robert J. Twieg
- Vano Chu
- et al.
- 1996
- Liquid Crystals
PaperElectrochromic nickel oxide thin films deposited under different sputtering conditions
- F.F. Ferreira
- M.H. Tabacniks
- et al.
- 1996
- Solid State Ionics
PaperConjectures about phase turbulence in the complex Ginzburg-Landau equation
- G. Grinstein
- C. Jayaprakash
- et al.
- 1996
- Physica D: Nonlinear Phenomena
Paper