High resolution electron beam lithography using ZEP-520 and KRS resists at low voltage
- D.M. Tanenbaum
- C.W. Lo
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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Publications
14462 results for Physical Sciences
Influence of structure on smectic A-smectic a phase separation
- P. Gorria
- H.T. Nguyen
- et al.
- 1996
- Liquid Crystals
PaperMicroporous polycyanurate networks
- J.L. Hedrick
- T.P. Russell
- et al.
- 1996
- J Polym Sci Part A
PaperAtomic scale studies of epitaxial growth processes using X-ray techniques
- D.W. Kisker
- G.B. Stephenson
- et al.
- 1996
- Journal of Crystal Growth
PaperHalf-integer flux quantum effect in tricrystal cuprate superconductors
- C.C. Tsuei
- J.R. Kirtley
- et al.
- 1996
- Physica C: Superconductivity and its Applications
PaperSmall molecule diffusion in a rubbery polymer near Tg: Effects of probe size, shape, and flexibility
- Denise D. Deppe
- Robert D. Miller
- et al.
- 1996
- Journal of Polymer Science, Part B: Polymer Physics
PaperHigh temperature NLO chromophores and polymers
- R.D. Miller
- D.M. Burland
- et al.
- 1996
- Molecular Crystals and Liquid Crystals Science and Technology Section B: Nonlinear Optics
PaperOn the mass sensitivity of acoustic-plate-mode sensors
- Fabien Josse
- Reiner Dahint
- et al.
- 1996
- Sensors and Actuators, A: Physical
PaperMagnetic microactuation of torsional polysilicon structures
- Jack W. Judy
- Richard S. Muller
- 1996
- Sensors and Actuators, A: Physical
PaperNickel suicide thermal stability on polycrystalline and single crystalline silicon
- E.G. Colgan
- J.P. Gambino
- et al.
- 1996
- Materials Chemistry and Physics
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