Properties of Cr-N films produced by reactive sputtering
- K.K. Shih
- D.B. Dove
- et al.
- 1986
- JVSTA
Paper
Publications
176 results at JVSTA
Langmuir probe characterization of magnetron operation
- H.R. Kaufman
- S.M. Rossnagel
- 1986
- JVSTA
PaperInteraction of metals with model polymer surfaces: Core level photoemission studies
- P.N. Sanda
- J.W. Bartha
- et al.
- 1986
- JVSTA
PaperContact and metallization problems in GaAs integrated circuits
- N. Braslau
- 1986
- JVSTA
PaperSolventiess polyimide films by vapor deposition
- J.R. Salem
- F.O. Sequeda
- et al.
- 1986
- JVSTA
PaperEffects of deposition methods on the temperature-dependent resistivity of tunasten films
- L. Krusin-Elbaum
- K.Y. Ahn
- et al.
- 1986
- JVSTA
PaperThe atomic structure of the NiSi2~Si(111) interface
- E.J. van Loenen
- 1986
- JVSTA
PaperProperties of reactively sputtered tungsten films in nitrogen and oxygen
- K.Y. Ahn
- S.B. Brodskv
- et al.
- 1986
- JVSTA
PaperSummary Abstract: Classical trajectory calculations of photon-stimulated desorption of ions from alkali-halides
- R.E. Walkup
- Ph. Avouris
- 1986
- JVSTA
PaperSummary Abstract: Electron vibrational spectroscopy of polymer-vacuum and polvmer-metal interfaces
- J.E. Demuth
- T.C. Clark
- 1986
- JVSTA
Paper