A silicon-containing resist for immersion lithography
- Ratnam Sooriyakumaran
- Wu-Song Huang
- et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Conference paper
Publications
26924 results for Science
Fabrication of dual damascene BEOL structures using a multi-level multiple exposure (MLME) scheme - Part 2. RIE-based pattern transfer and completion of dual damascene process yielding an electrically functional via chain
- Stefan Harrer
- John C Arnold
- et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Conference paperMulti-level integration of patternable low-κ material into advanced Cu BEOL
- Qinghuang Lin
- Shyng-Tsong Chen
- et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Conference paperHigh contact angle fluorosulfonamide-based materials for immersion lithography
- Daniel P. Sanders
- Linda K. Sundberg
- et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Conference paperLearning and generalization with the information bottleneck
- Ohad Shamir
- Sivan Sabato
- et al.
- 2010
- Theoretical Computer Science
PaperSingle mutation effects on conformational change and membrane deformation of influenza hemagglutinin fusion peptides
- Jingyuan Li
- Payel Das
- et al.
- 2010
- Journal of Physical Chemistry B
PaperDeposition of aluminum-doped zinc oxide thin films for optical applications using rf and dc magnetron sputter deposition
- Kousik Sivakumar
- S.M. Rossnagel
- 2010
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperDynamic power allocation under arbitrary varying channels - The multi-user case
- Niv Buchbinder
- Liane Lewin-Eytan
- et al.
- 2010
- INFOCOM 2010
Conference paperVirtual appliance content distribution for a global infrastructure cloud service
- Amir Epstein
- Dean H. Lorenz
- et al.
- 2010
- INFOCOM 2010
Conference paperImproving the scalability of data center networks with traffic-aware virtual machine placement
- Xiaoqiao Meng
- Vasileios Pappas
- et al.
- 2010
- INFOCOM 2010
Conference paper