Demonstrating the benefits of source-mask optimization and enabling technologies through experiment and simulations
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- Alan E. Rosenbluth
- et al.
- 2010
- SPIE Advanced Lithography 2010
Conference paper
Publications
26883 results for Science
Predicting and reducing substrate induced focus error
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- Brian Sapp
- et al.
- 2010
- SPIE Advanced Lithography 2010
Conference paperConcepts and experiments for optimizing wide-input streaming CRC circuits
- Andreas Döring
- 2010
- ARCS 2010
Conference paperTight bounds for delay-sensitive aggregation
- Yvonne Anne Pignolet
- Stefan Schmid
- et al.
- 2010
- Discrete Mathematics and Theoretical Computer Science
PaperOrganocatalysis: Opportunities and challenges for polymer synthesis
- Matthew K. Kiesewetter
- Eun Ji Shin
- et al.
- 2010
- Macromolecules
ReviewWildcarded identity-based encryption
- Michel Abdalla
- James Birkett
- et al.
- 2010
- Journal of Cryptology
PaperSynthesis and size-dependent crystallization of colloidal germanium telluride nanoparticles
- Marissa A. Caldwell
- Simone Raoux
- et al.
- 2010
- Journal of Materials Chemistry
PaperSimulation optimization using the cross-entropy method with optimal computing budget allocation
- Donghai He
- Loo Hay Lee
- et al.
- 2010
- ACM TOMACS
PaperDynamic changes in the human methylome during differentiation
- Louise Laurent
- Eleanor Wong
- et al.
- 2010
- Genome Research
PaperA multiple source, or, is a striped apple more striped than a striped orange?
- Dimitri Kanevsky
- 2010
- Behavioral and Brain Sciences
Paper