Rise of chemical amplification resists from laboratory curiosity to paradigm enabling Moore's law
- Hiroshi Ito
- 2008
- SPIE Advanced Lithography 2008
Conference paper
Publications
25371 results for Science
The Deep Computing Messaging Framework: Generalized scalable message passing on the Blue Gene/P supercomputer
- Sameer Kumar
- Dong Chen
- et al.
- 2008
- ICS 2008
Conference paperResist freezing process for double exposure lithography
- Kuang-Jung Rex Chen
- Wu-Song Huang
- et al.
- 2008
- SPIE Advanced Lithography 2008
Conference paperGraded spin-on organic bottom antireflective coating for high NA lithography
- Dario L. Goldfarb
- Sean D. Burns
- et al.
- 2008
- SPIE Advanced Lithography 2008
Conference paperA new class of low bake resists for 193-nm immersion lithography
- Ratnam Sooriyakumaran
- Richard DiPietro
- et al.
- 2008
- SPIE Advanced Lithography 2008
Conference paperManaging SLAs of heterogeneous workloads using dynamic application placement
- David Carrera
- Malgorzata Steinder
- et al.
- 2008
- HPDC 2008
Conference paperSupramolecular assembly of block copolypeptides with semiconductor nanocrystals
- Bayu Atmaja
- Jennifer N. Cha
- et al.
- 2008
- Langmuir
PaperFacile postpolymerization end-modification of RAFT polymers
- Jason M. Spruell
- Benjamin A. Levy
- et al.
- 2008
- J Polym Sci Part A
PaperThin film nanotube transistors based on self-assembled, aligned, semiconducting carbon nanotube arrays
- Michael Engel
- Joshua P. Small
- et al.
- 2008
- ACS Nano
PaperEfficient dynamic policy monitoring in service oriented architectures
- Hakan Hacigümüş
- 2008
- APSCC 2008
Conference paper