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- et al.
- 2011
- Proceedings of SPIE - The International Society for Optical Engineering 2011
Conference paper
Publications
3606 results for Mathematical Sciences
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- Moutaz Fakhry
- et al.
- 2011
- SPIE Advanced Lithography 2011
Conference paperContact patterning strategies for 32nm and 28nm technology
- Bradley Morgenfeld
- Ian Stobert
- et al.
- 2011
- SPIE Advanced Lithography 2011
Conference paperQualification, monitoring, and integration into a production environment of the world's first fully programmable illuminator
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- Daniel Corliss
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- 2011
- SPIE Advanced Lithography 2011
Conference paperSpacer-defined double patterning for 20-nm and beyond logic BEOL technology
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- Chiew-Seng Koay
- et al.
- 2011
- SPIE Advanced Lithography 2011
Conference paperEUV OPC for 56 nm metal pitch
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- Matt Colburn
- et al.
- 2011
- SPIE Advanced Lithography 2011
Conference paperArchitecture and mechanisms of Hadoop distributed file system
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- Long-Bin Lai
- et al.
- 2011
- Dongbei Daxue Xuebao/Journal of Northeastern University
PaperA trace-based Java JIT compiler retrofitted from a method-based compiler
- Hiroshi Inoue
- Hiroshige Hayashizaki
- et al.
- 2011
- CGO 2011
Conference paperAdaptive identification in torii in the king lattice
- Yael Ben-Haim
- Antoine Lobstein
- et al.
- 2011
- Electronic Journal of Combinatorics
PaperOverlay improvement roadmap: Strategies for scanner control and product disposition for 5-nm overlay
- 2011
- SPIE Advanced Lithography 2011
Conference paper