Atomic force microscopy experimentation at surfaces: Hardness, wear and lithographic applications
- T.A. Jung
- A. Moser
- et al.
- 1993
- SPIE Advanced Optical Technologies 1993
Conference paper
Publications
9271 results for Computer Science
Arrayed lithography using STM-based microcolumns
- T. H. Philip Chang
- Lawrence P. Muray
- et al.
- 1993
- SPIE Advanced Optical Technologies 1993
Conference paperA NEW INTERFACE PARADIGM: AUTOMATIC RECOGNITION OF INTEGRATED SPEECH AND HANDWRITING INFORMATION
- Jerome R. Bellegarda
- Dimitri Kanevsky
- 1993
- INTERSPEECH - Eurospeech 1993
Conference paperWORD LOOKAHEAD SCHEME FOR CROSS-WORD RIGHT CONTEXT MODELS IN A STACK DECODER
- L.R. Bahl
- Peter V. de Souza
- et al.
- 1993
- INTERSPEECH - Eurospeech 1993
Conference paperA representation language for mechanical behavior
- Dorothy Neville
- Leo Joskowicz
- 1993
- ASME DETC 1993
Conference paperAcid-catalyzed single-layer resists for ArF lithography
- Roderick R. Kunz
- Robert D. Allen
- et al.
- 1993
- Microlithography 1993
Conference paperCharacterization and simulation of acid catalyzed DUV positive photoresist
- Nicholas K. Eib
- Eytan Barouch
- et al.
- 1993
- Microlithography 1993
Conference paperInfluence of polymer properties on airborne chemical contamination of chemically amplified resists
- W.D. Hinsberg
- Scott A. MacDonald
- et al.
- 1993
- Microlithography 1993
Conference paperPositive tone dry-develop resist based on cross-linking a phenolic resin
- Scott A. MacDonald
- C.B. Larson
- et al.
- 1993
- Microlithography 1993
Conference paperBase-catalyzed photosensitive polyimide
- Dennis R. McKean
- Gregory M. Waliraff
- et al.
- 1993
- Microlithography 1993
Conference paper