Publications

9271 results for Computer Science

Vector diffraction analysis of phase-mask imaging in photoresist films
- - Donis G. Flagello
  - Alan E. Rosenbluth
- 1993
- Microlithography 1993
Conference paper
170 nm gates fabricated by phase-shift mask and top anti-reflector process
- - T.A. Brunner
  - P.N. Sanda
  - et al.
- 1993
- Microlithography 1993
Conference paper
Comparison of scalar and vector diffraction modelling for deep-UV lithography
- - Bruce W. Smith
  - Donis G. Flagello
  - et al.
- 1993
- Microlithography 1993
Conference paper
TAR processing for CD control in I-line and 248 nm lithography
- - Christopher Lyons
  - Nicholas Eib
  - et al.
- 1993
- Microlithography 1993
Conference paper
Rim phase-shift mask combined with off-axis illumination: A path to 0.5Λ/NA geometries
- - T.A. Brunner
- 1993
- Microlithography 1993
Conference paper
A tetrahedral interpolation technique for color space conversion
- - James M. Kasson
  - Wil Plouffe
  - et al.
- 1993
- IS&T/SPIE Electronic Imaging 1993
Conference paper
Process optimization of APEX-E
- - Karen Petrillo
- 1993
- Microlithography 1993
Conference paper
Post-exposure bake as a process-control parameter for chemically-amplffied photoresist
- - John L. Sturtevant
  - Steven J. Holmes
  - et al.
- 1993
- Microlithography 1993
Conference paper
Developments in 2D AFM metrology
- - Diana Nyyssonen
- 1993
- Microlithography 1993
Conference paper
On the complexity of queries in the logical data model
- - Gabriel M. Kuper
  - Moshe Y. Vardi
- 1993
- Theoretical Computer Science
Paper