Rim phase-shift mask combined with off-axis illumination: A path to 0.5Λ/NA geometries
- T.A. Brunner
- 1993
- Microlithography 1993
Conference paper
Publications
9289 results for Computer Science
170 nm gates fabricated by phase-shift mask and top anti-reflector process
- T.A. Brunner
- P.N. Sanda
- et al.
- 1993
- Microlithography 1993
Conference paperComparison of scalar and vector diffraction modelling for deep-UV lithography
- Bruce W. Smith
- Donis G. Flagello
- et al.
- 1993
- Microlithography 1993
Conference paperDevelopments in 2D AFM metrology
- Diana Nyyssonen
- 1993
- Microlithography 1993
Conference paperA tetrahedral interpolation technique for color space conversion
- James M. Kasson
- Wil Plouffe
- et al.
- 1993
- IS&T/SPIE Electronic Imaging 1993
Conference paperPost-exposure bake as a process-control parameter for chemically-amplffied photoresist
- John L. Sturtevant
- Steven J. Holmes
- et al.
- 1993
- Microlithography 1993
Conference paperProcess optimization of APEX-E
- Karen Petrillo
- 1993
- Microlithography 1993
Conference paperOn the complexity of queries in the logical data model
- Gabriel M. Kuper
- Moshe Y. Vardi
- 1993
- Theoretical Computer Science
PaperFinite-model theory - a personal perspective
- 1993
- Theoretical Computer Science
PaperPARADIGM: A compiler for automatic data distribution on multicomputers
- Manish Gupta
- Prithviraj Banerjee
- 1993
- ICS 1993
Conference paper