Publications

3599 results for Mathematical Sciences

Smaller, smarter, faster, and more accurate: The new overlay metrology
- - Nelson M. Felix
  - Allen H. Gabor
  - et al.
- 2010
- SPIE Advanced Lithography 2010
CD-SEM metrology of spike detection on sub-40 nm contact holes
- - Yoshinori Momonoi
  - Taro Osabe
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Quantum channel capacities
- - Graeme Smith
- 2010
- ITW 2010
Resist-based polarization monitoring with phase-shift masks at 1.35 numerical aperture: Tool-to-tool comparison
- - Gregory McIntyre
  - Richard Tu
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Stabilizer subsystem codes with spatially local generators
- - Sergey Bravyi
- 2010
- ITW 2010
3D-AFM enhancement for CD metrology dedicated to lithography sub-28-nm node requirements
- - Johann Foucher
  - Narender Rana
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Sparse Markov Net learning with priors on regularization parameters
- - Katya Scheinberg
  - Irina Rish
  - et al.
- 2010
- ISAIM 2010
Smooth projective hashing and two-message oblivious transfer
- - Shai Halevi
  - Yael Tauman Kalai
- 2010
- Journal of Cryptology
New tools and methodology for advanced parametric and defect structure test
- - Raphael Robertazzi
  - Louis Medina
  - et al.
- 2010
- IEEE ITC 2010
Single photon emission and detection at the nanoscale utilizing semiconductor nanowires
- - Michael E. Reimer
  - Maarten P. Van Kouwen
  - et al.
- 2010
- SPIE Optical Engineering + Applications 2010