Process latitude study of focused ion-beam-deposited gold for clear x-ray mask repair
- Patricia G. Blauner
- Andrew D. Dubner
- et al.
- 1993
- Microlithography 1993
Conference paper
Publications
14466 results for Physical Sciences
Photoresist process latitude optimization for synchrotron x-ray lithography
- Andrew T. Pomerene
- David E. Seeger
- et al.
- 1993
- Microlithography 1993
Conference paperFully-scaled 0.25-micron bipolar technology using variable shaped electron-beam lithography
- Philip J. Coane
- Kaolin G. Chiong
- et al.
- 1993
- Microlithography 1993
Conference paperMixed e-beam/optical lithography process for the fabrication of sub-0.25-μm poly gates
- Keith T. Kwietniak
- Michael G. Rosenfield
- et al.
- 1993
- Microlithography 1993
Conference paperMonte carlo study of the properties of self-assembled monolayers formed by adsorption of CH3(CH2)15 SH on the (111) surface of gold
- J. Ilja Siepmann
- Ian R. McDonald
- 1993
- Molecular Physics
PaperGeneration of tunable, fcintosecond-tiinc-scale, vuv pulses by four-wave difference-frequency mixing in xenon
- J.H. Glownia
- D.R. Gnass
- et al.
- 1993
- SPIE OE/LASE 1993
Conference paperSolid-state shot noise
- Rolf Landauer
- 1993
- Physical Review B
PaperOptically determined minority-carrier transport in GaAs/AlxGa1-xAs heterostructures
- D.J. Wolford
- G.D. Gilliland
- et al.
- 1993
- Physical Review B
PaperInverse photoemission from V, Cr, Mn, Fe, and Co monolayers on Ag(100)
- J.E. Ortega
- F.J. Himpsel
- 1993
- Physical Review B
PaperObservation of valence-band Landau-level mixing by resonant magnetotunneling
- A. Zaslavsky
- D.A. Grützmacher
- et al.
- 1993
- Physical Review B
Paper