Phase plates in the object plane for microlithography
- M. Levenson
- 1993
- SPIE OE/LASE 1993
Conference paper
Publications
14462 results for Physical Sciences
Imaging structural details in closely related molecular adsorbate systems
- V.M. Hallmark
- S. Chiang
- 1993
- Surface Science
PaperHydrogen effects in CVD: Selective etching and metastable phases
- J. Wintterlin
- Ph. Avouris
- 1993
- Surface Science
PaperLayer-by-layer growth of cuprate thin films by pulsed laser deposition
- A. Gupta
- M.Y. Chern
- et al.
- 1993
- Physica C: Superconductivity and its applications
PaperFlux-reorientation in irradiated YBa2Cu3O7 and Bi2Sr2CaCu2O8 crystals
- L. Klein
- E.R. Yacoby
- et al.
- 1993
- Physica C: Superconductivity and its applications
PaperA quantum chemical investigation of the interaction of organic molecules and polymers with graphite. Comparison with the STM imaging of organic adsorbates
- G. Lambin
- M.H. Delvaux
- et al.
- 1993
- Synthetic Metals
PaperNew differential laser interferometer/vibrometer for nanometer structural displacement/vibration measurements
- Chih-Kung Lee
- T.W. Wu
- 1993
- Structures, Structural Dynamics, and Materials Conference - Adaptive Structures Forum 1993
Conference paperHigh pressure CVD tungsten-stud formation using RIE cluster processes
- H.Y. Ng
- D.J. Dichauzi
- 1992
- SPIE Microelectronic Processing 1992
Conference paperEffects of quantum levels on transport through a Coulomb island
- E.B. Foxman
- P.L. McEuen
- et al.
- 1993
- Physical Review B
PaperCritical test of the structure of the ordered phase in epitaxially grown SixGe1-x films
- F.K. LeGoues
- R.M. Tromp
- et al.
- 1993
- Physical Review B
Paper