Publications

509 results at JES

Anomalous Etch Structures Using Ethylenediamine-Pyrocatechol-Water Based Etchants and Their Elimination
- - A. Reisman
  - M. Berkenblit
  - et al.
- 2019
- JES
Paper
Resolution Limits Of PMMA Resist for Exposure with 50 kV Electrons
- - Alec N. Broers
- 2019
- JES
Paper
II. Oxidation of Al Films
- - Jean Grimblot
  - Jerome M. Eldridge
- 2019
- JES
Paper
Fabrication Processes for a Silicon Substrate Package for Integrated Gallium Arsenide Laser Arrays
- - Michael J. Brady
- 2019
- JES
Paper
Plasma Oxide FET Devices
- - A. Ray
  - A. Reisman
- 2019
- JES
Paper
Pre- and Postepitaxial Gettering of Oxidation and Epitaxial Stacking Faults in Silicon
- - M.C. Chen
  - V.J. Silvestri
  - et al.
- 2019
- JES
Paper
Silicon Oxidation Studies: The Oxidation of Heavily B- and P-Doped Single Crystal Silicon
- - E.A. Irene
  - D.W. Dong
- 2019
- JES
Paper
Effect of Plating Parameters on Electrodeposited Nife
- - Jean Horkans
- 2019
- JES
Paper
The Formation of SiO₂ in an RF Generated Oxygen Plasma: I. The Pressure Range Below 10 mTorr
- - A. Ray
  - A. Reisman
- 2019
- JES
Paper
Radiochemical Analysis of β-Al2O3, and the Preparation of Na-22 Tagged Monocrystals
- - L.M. Foster
  - J.E. Scardefield
- 2019
- JES
Paper