Publications

176 results at JVSTA

Summary Abstract: Diagnostics in plasma processing
- - J.W. Coburn
- 1986
- JVSTA
Paper
Effects of deposition methods on the temperature-dependent resistivity of tunasten films
- - L. Krusin-Elbaum
  - K.Y. Ahn
  - et al.
- 1986
- JVSTA
Paper
Summary Abstract: Energy distributions of electronically excited molecules produced by ion bombardment of silicon
- - R.E. Walkup
  - Ph. Avouris
- 1985
- JVSTA
Paper
Summary Abstract: Chemical processes in fluorine-based etching reactions
- - F.R. McFeely
- 1985
- JVSTA
Paper
Reactive sputtering of copper and silicon near the sputtering threshold
- - T.M. Mayer
  - J.M.E. Harper
  - et al.
- 1985
- JVSTA
Paper
Lattice relaxation in aluminum monolayers
- - Inder P. Batra
- 1985
- JVSTA
Paper
Summary Abstract: Laser-assisted dry process soldering
- - P.A. Moskowitz
  - A. Davidson
- 1985
- JVSTA
Paper
Interdiffusion at the polyimide-Cu interface
- - R.M. Tromp
  - F. Leqoues
  - et al.
- 1985
- JVSTA
Paper
Summary Abstract: Chromium as an inert marker in copper oxidation
- - M.A. Frisch
- 1985
- JVSTA
Paper
Summary Abstract: The interaction mechanism of inelastic electron tunneling spectroscopy probed by high resolution electron energy loss spectroscopy
- - M. Liehr
  - P.A. Thiry
  - et al.
- 1985
- JVSTA
Paper