Publications

176 results at JVSTA

Summary Abstract: High temperature decomposition of SiO₂at the Si/SiO₂ interface
- - G.W. Rubloff
  - R.M. Tromp
  - et al.
- 1986
- JVSTA
Paper
Hollow-cathode-enhanced magnetron sputtering
- - J.J. Cuomo
  - S.M. Rossnagel
- 1986
- JVSTA
Paper
Summary Abstract: Chemical processes in fluorine-based etching reactions
- - F.R. McFeely
- 1985
- JVSTA
Paper
Summary Abstract: Raman scattering at buried semiconductor-metal interfaces
- - J.C. Tsang
- 1985
- JVSTA
Paper
Summary Abstract: The interaction mechanism of inelastic electron tunneling spectroscopy probed by high resolution electron energy loss spectroscopy
- - M. Liehr
  - P.A. Thiry
  - et al.
- 1985
- JVSTA
Paper
Lattice relaxation in aluminum monolayers
- - Inder P. Batra
- 1985
- JVSTA
Paper
Interdiffusion at the polyimide-Cu interface
- - R.M. Tromp
  - F. Leqoues
  - et al.
- 1985
- JVSTA
Paper
Summary Abstract: Chromium as an inert marker in copper oxidation
- - M.A. Frisch
- 1985
- JVSTA
Paper
Summary Abstract: Laser-assisted dry process soldering
- - P.A. Moskowitz
  - A. Davidson
- 1985
- JVSTA
Paper
Summary Abstract: Plasma potentials of 13.56 MHz rf argon glow discharges in a planar system
- - K. Kehler
  - J.W. Coburn
  - et al.
- 1985
- JVSTA
Paper