Commercialization of Non-PFAS KrF and Development of Non-PFAS EUV Photoresists
- Cong Liu
- Joseph Lachowski
- et al.
- 2025
- SPIE Advanced Lithography 2025
Conference paper
Publications
3606 results for Mathematical Sciences
New Photoacid Generators Designed for Advanced EUV Patterning
- Kamal P. Pandey
- Emad Aqad
- et al.
- 2025
- SPIE Advanced Lithography 2025
Conference paperConsideration on segregation behavior of the surface localization material and the pattern roughness degradation in EUV lithography
- KwangMo Choi
- YunJi Kim
- et al.
- 2025
- SPIE Advanced Lithography 2025
Conference paperNew Molecular Resist Design for Advanced Patterning
- Vageesha Liyana Gunawardana
- Emad Aqad
- et al.
- 2025
- SPIE Advanced Lithography 2025
Conference paperStochastic ISTA/FISTA Adaptive Step Search Algorithms for Convex Composite Optimization
- Lam M. Nguyen
- Katya Scheinberg
- et al.
- 2025
- Journal of Optimization Theory and Applications
PaperSingle-pass top-N subgraph centrality of graphs via subspace projections
- Vassilis Kalantzis
- Georgios Kollias
- et al.
- 2025
- Journal of Complex Networks
PaperHybrid Tree Tensor Networks for Quantum Simulation
- Julian Schuhmacher
- Marco Ballarin
- et al.
- 2025
- PRX Quantum
PaperLaser annealing for scalable frequency control on multi-qubit quantum processors
- 2025
- SPIE Photonics West 2025
Conference paperVariational Quantum Simulation: A Case Study for Understanding Warm Starts
- Ricard Puig
- Marc Drudis
- et al.
- 2025
- PRX Quantum
PaperMULTIVARIATE TRACE ESTIMATION USING QUANTUM STATE SPACE LINEAR ALGEBRA
- Liron Mor-Yosef
- Shashanka Ubaru
- et al.
- 2025
- SIMAX
Paper