Spatial signature in local overlay measurements - "what CD-SEM can tell us and optical measurements can not"
- Scott Halle
- Daniel Moore
- et al.
- 2010
- SPIE Advanced Lithography 2010
Conference paper
Publications
3606 results for Mathematical Sciences
Resist-based polarization monitoring with phase-shift masks at 1.35 numerical aperture: Tool-to-tool comparison
- Gregory McIntyre
- Richard Tu
- et al.
- 2010
- SPIE Advanced Lithography 2010
Conference paperCD-SEM metrology of spike detection on sub-40 nm contact holes
- Yoshinori Momonoi
- Taro Osabe
- et al.
- 2010
- SPIE Advanced Lithography 2010
Conference paperStabilizer subsystem codes with spatially local generators
- Sergey Bravyi
- 2010
- ITW 2010
Conference paperSmooth projective hashing and two-message oblivious transfer
- Shai Halevi
- Yael Tauman Kalai
- 2010
- Journal of Cryptology
PaperNew tools and methodology for advanced parametric and defect structure test
- Raphael Robertazzi
- Louis Medina
- et al.
- 2010
- IEEE ITC 2010
Conference paperSingle photon emission and detection at the nanoscale utilizing semiconductor nanowires
- Michael E. Reimer
- Maarten P. Van Kouwen
- et al.
- 2010
- SPIE Optical Engineering + Applications 2010
Conference paperOn the local convergence of a derivative-free algorithm for least-squares minimization
- Hongchao Zhang
- Andrew R. Conn
- 2010
- COAP
PaperMiscellanea: Probability-based Latin hypercube designs for slid-rectangular regions
- Ying Hung
- Yasuo Amemiya
- et al.
- 2010
- Biometrika
PaperPADS: A probabilistic activity detection framework for video data
- Massimiliano Albanese
- Rama Chellappa
- et al.
- 2010
- IEEE TPAMI
Paper