Publications

14466 results for Physical Sciences

Electron Beam-Induced Reactions of Orthonaphthoquinone-Diazide-Sulfonyl Derivatives in Phenolic-Type Resins
- - Hiroyuki Hiraoka
  - Adolfo R. Gutierrez
- 2019
- JES
Paper
Effect of CO on the Low Temperature Diffusion of Cr and Si Through Thin Gold Films
- - Chin-An Chang
- 2019
- JES
Paper
Silicon Oxidation Studies: Some Aspects of the Initial Oxidation Regime
- - E.A. Irene
- 2019
- JES
Paper
Control of Plasma Etch Profiles with Plasma Sheath Electric Field and RF Power Density
- - R.S. Horwath
- 2019
- JES
Paper
II. Oxidation of Al Films
- - Jean Grimblot
  - Jerome M. Eldridge
- 2019
- JES
Paper
Dry Etching for VLSI—A Review
- - L.M. Ephrath
- 2019
- JES
Paper
Interactions Between Cr and Pt Films: New Cr-Pt Phases
- - J.E.E. Baglin
  - F.M. d'Heurle
  - et al.
- 2019
- JES
Paper
The Controlled Etching of Silicon in Catalyzed Ethylenediamine-Pyrocatechol-Water Solutions
- - A. Reisman
  - M. Berkenblit
  - et al.
- 2019
- JES
Paper
Developer Temperature Effects on E-Beam and Optically Exposed Positive Photoresist
- - J.M. Shaw
  - M. Hatzakis
- 2019
- JES
Paper
Predicting Radiation Sensitivity of Polymers
- - C.G. Willson
  - K. Kinoshita
- 2019
- JES
Paper