Business value analysis of IT services
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- et al.
- 2007
- SCC 2007
Conference paper
Publications
25371 results for Science
Advanced verification of distributed WS-BPEL business processes incorporating CSSA-based data flow analysis
- Simon Moser
- Axel Martens
- et al.
- 2007
- SCC 2007
Conference paperIT service management automation - A hybrid methodology to integrate and orchestrate collaborative human centric and automation centric workflows
- Naga Ayachitula
- Melissa Buco
- et al.
- 2007
- SCC 2007
Conference paperGlobal optimization of masks, including film stack design to restore TM contrast in high NA TCC's
- Alan E. Rosenbluth
- David Melville
- et al.
- 2007
- SPIE Advanced Lithography 2007
Conference paperModeling polarization for Hyper-NA lithography tools and masks
- Kafai Lai
- Alan E. Rosenbluth
- et al.
- 2007
- SPIE Advanced Lithography 2007
Conference paperSelf-aligned, self-assembled organosilicate line patterns of ∼20nm half-pitch from block copolymer mediated self-assembly
- Ho-Cheol Kim
- Joy Cheng
- et al.
- 2007
- SPIE Advanced Lithography 2007
Conference paperUse of starburst patterns in optical lithography
- M. Burkhardt
- Cyrus Tabery
- 2007
- SPIE Advanced Lithography 2007
Conference paperFluoroalcohol materials with tailored interfacial properties for immersion lithography
- Daniel P. Sanders
- Linda K. Sundberg
- et al.
- 2007
- SPIE Advanced Lithography 2007
Conference paperCoupling-aware mixed dummy metal insertion for lithography
- Liang Deng
- Martin D.F. Wong
- et al.
- 2007
- SPIE Advanced Lithography 2007
Conference paperDark field Double Dipole Lithography (DDL) for back-end-of-line processes
- M. Burkhardt
- Sean Burns
- et al.
- 2007
- SPIE Advanced Lithography 2007
Conference paper