Distinguishing dose, focus and blur for lithography characterization and control
- Christopher P. Ausschnitt
- Timothy A. Brunner
- 2007
- SPIE Advanced Lithography 2007
Conference paper
Publications
25371 results for Science
The effect of photoresist/topcoat properties on defect formation in immersion lithography
- G.M. Wallraff
- Carl E. Larson
- et al.
- 2007
- Proceedings of SPIE 2007
Conference paperOntologies and rules in business models
- Mark H. Linehan
- 2007
- EDOC 2007
Workshop paperDoping and phonon renormalization in carbon nanotubes
- J.C. Tsang
- M. Freitag
- et al.
- 2007
- Nature Nanotechnology
PaperInapproximability results for combinatorial auctions with submodular utility functions
- Subhash Khot
- Richard J. Lipton
- et al.
- 2007
- Algorithmica (New York)
PaperMoment switching in nanotube magnetic force probes
- J.R. Kirtley
- Z. Deng
- et al.
- 2007
- Nanotechnology
PaperUsing a model-driven transformational approach and service-oriented architecture for service delivery management
- Santhosh Kumaran
- Pete Bishop
- et al.
- 2007
- IBM Systems Journal
PaperAn integration model for organizing IT service management
- John Black
- Christine Draper
- et al.
- 2007
- IBM Systems Journal
PaperA configuration management database architecture in support of IBM service management
- Hari Madduri
- Shepherd S.B. Shi
- et al.
- 2007
- IBM Systems Journal
PaperSequence-based protein domain boundary prediction using BP neural network with various property profiles
- Lei Ye
- Ting Liu
- et al.
- 2007
- Proteins: Structure, Function and Genetics
Paper