On the Nature of Fixed Oxide Charge
- S.I. Raider
- A. Berman
- 2019
- JES
Paper
Publications
14466 results for Physical Sciences
The Formation of SiO2 in an RF Generated Oxygen Plasma: I. The Pressure Range Below 10 mTorr
- A. Ray
- A. Reisman
- 2019
- JES
PaperInvestigation of Laser-Enhanced Electroplating Mechanisms
- J. Cl. Puippe
- R.E. Acosta
- et al.
- 2019
- JES
PaperElectrical Properties of Al/Ti Contact Metallurgy for VLSI Application
- C.-Y. Ting
- B.L. Crowder
- 2019
- JES
PaperOxidation and Corrosion Studies of Fe1-xPdx Films
- Wen-Yaung Lee
- G. Scherer
- et al.
- 2019
- JES
PaperEffects of Oxidation on the Atmospheric Corrosion of Permalloy Films
- Wen-Yaung Lee
- G. Scherer
- et al.
- 2019
- JES
PaperI. Interaction of Al Films with O2 at Low Pressures
- Jean Grimblot
- Jerome M. Eldridge
- 2019
- JES
PaperDry Etching for VLSI—A Review
- L.M. Ephrath
- 2019
- JES
PaperInfluence of the Growth Conditions of Al2O3 Passivating Layers on the Corrosion of Aluminum Films in Water
- J. Grimblot
- J.M. Eldridge
- 2019
- JES
PaperPolymerization of Aromatic Silanes in RF Plasmas
- Ivan Haller
- 2019
- JES
Paper