Dry Etching for VLSI—A Review
- L.M. Ephrath
- 2019
- JES
Publications
14446 results for Physical Sciences
Effects of Conductor Stress on Bubble Propagation in Contiguous Disk Devices
- K.Y. Ahn
- S.M. Kane
- 2019
- JES
Control of Plasma Etch Profiles with Plasma Sheath Electric Field and RF Power Density
- R.S. Horwath
- 2019
- JES
Investigation of Laser-Enhanced Electroplating Mechanisms
- J. Cl. Puippe
- R.E. Acosta
- et al.
- 2019
- JES
The Fabrication of High Precision Nozzles by the Anisotropic Etching of (100) Silicon
- E. Bassous
- E.F. Baran
- 2019
- JES
Copolymers of Methyl Methacrylate and Methacrylic Acid and Their Metal Salts as Radiation Sensitive Resists
- Ivan Haller
- Ralph Feder
- et al.
- 2019
- JES
Effects of Several Parameters on the Corrosion Rates of Al Conductors in Integrated Circuits
- Israel Lerner
- Jerome M. Eldridge
- 2019
- JES
The Anodic Sectioning of Beryllium
- M.T. Shehata
- Roger Kelly
- et al.
- 2019
- JES
The Formation of SiO2 in an RF Generated Oxygen Plasma: II. The Pressure Range Above 10 mTorr
- A. Ray
- A. Reisman
- 2019
- JES
RIE Contamination of Etched Silicon Surfaces
- L.M. Ephrath
- R.S. Bennett
- 2019
- JES