Novolac based deep-uv resists
- Dennis R. McKean
- Scott A. Macdonald
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paper
Publications
9293 results for Computer Science
Sub-picosecond raman spectroscopy of semiconductors
- J.C. Tsang
- J.A. Kash
- 1989
- Proceedings of SPIE 1989
Conference paperPractical characterization of 0.5 μm optical lithography
- Donis G. Flagello
- Andrew T. S. Pomerene
- 1989
- Proceedings of SPIE 1989
Conference paperTwo-regime ablative hole formation process in tellurium and tellurium-alloy films
- M. Chen
- V. Marrello
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperMetrology with an atomic force microscope
- P.C.D. Hobbs
- H.K. Wickramasinghe
- 1989
- Proceedings of SPIE 1989
Conference paperGel resist processing for submicron CMOS and bipolar circuits
- K.E. Petrillo
- M. Smyth
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperChemical and physical aspects of multilayer resist processing
- J. Paraszczak
- E. Babich
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperChromium mask damage in excimer laser projection processing
- J.T.C. Yeh
- 1989
- Proceedings of SPIE 1989
Conference paperSoft x-ray diffraction of striated muscle
- S.F. Fan
- W.B. Yun
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperCondenser aberrations in Köhler illumination
- Douglas S. Goodman
- Alan E. Rosenbluth
- 1989
- Proceedings of SPIE 1989
Conference paper