Novolac based deep-uv resists
- Dennis R. McKean
- Scott A. Macdonald
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paper
Publications
9289 results for Computer Science
Reading and writing of photochemical holes using gaalas diode lasers
- P. Pokrowsky
- W.E. Moerner
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperCondenser aberrations in Köhler illumination
- Douglas S. Goodman
- Alan E. Rosenbluth
- 1989
- Proceedings of SPIE 1989
Conference paperCritical issues in high density magnetic and optical data storage
- Alan E. Bell
- 1989
- Proceedings of SPIE 1989
Conference paperAqueous base developable deep uv resist systems based on novel monomeric and polymeric dissolution inhibitors
- Hiroshi Ito
- 1989
- Proceedings of SPIE 1989
Conference paperChemical and physical aspects of multilayer resist processing
- J. Paraszczak
- E. Babich
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperSoft vacuum pulsed electron beam processing of teflon and teflon-like films
- J. Krishnaswamy
- G.J. Collins
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperA double crystal multilayer x-ray monochromator
- L. Golub
- A. Quillen
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperFilters for soft x-ray solar telescopes
- Eberhard Spiller
- Kurt Grebe
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperEnhancement of the reflectivity of multilayer x-ray mirrors by ion polishing
- Eberhard Spiller
- 1989
- Proceedings of SPIE 1989
Conference paper