Direct Evidence for 1 nm Pores in “Dry” Thermal SiO2 from High Resolution Transmission Electron Microscopy
- J.M. Gibson
- D.W. Dong
- 2019
- JES
Publications
14446 results for Physical Sciences
Polymerization of Aromatic Silanes in RF Plasmas
- Ivan Haller
- 2019
- JES
Ellipsometry Measurements of Polycrystalline Silicon Films
- E.A. Irene
- D.W. Dong
- 2019
- JES
Post-Epitaxial Polysilicon and Si3N4 Gettering in Silicon
- M.C. Chen
- V.J. Silvestri
- 2019
- JES
An Electrochemically Sealed Al2O3 Passivation Layer for Aluminum Alloys
- M.H. Lee
- A. Homola
- 2019
- JES
RIE Contamination of Etched Silicon Surfaces
- L.M. Ephrath
- R.S. Bennett
- 2019
- JES
I. Interaction of Al Films with O2 at Low Pressures
- Jean Grimblot
- Jerome M. Eldridge
- 2019
- JES
Investigation of Laser-Enhanced Electroplating Mechanisms
- J. Cl. Puippe
- R.E. Acosta
- et al.
- 2019
- JES
Effects of Several Parameters on the Corrosion Rates of Al Conductors in Integrated Circuits
- Israel Lerner
- Jerome M. Eldridge
- 2019
- JES
Luminescence of Silica Glasses Containing Copper
- J.M. Brownlow
- I.F. Chang
- 2019
- JES