Dry Etching for VLSI—A Review
- L.M. Ephrath
- 2019
- JES
Paper
Publications
14465 results for Physical Sciences
Electrical Properties of Al/Ti Contact Metallurgy for VLSI Application
- C.-Y. Ting
- B.L. Crowder
- 2019
- JES
PaperHigh Temperature Flow Resistance of Micron Sized Images in AZ Resists
- H. Hiraoka
- J. Pacansky
- 2019
- JES
PaperInvestigation of Laser-Enhanced Electroplating Mechanisms
- J. Cl. Puippe
- R.E. Acosta
- et al.
- 2019
- JES
PaperCopolymers of Methyl Methacrylate and Methacrylic Acid and Their Metal Salts as Radiation Sensitive Resists
- Ivan Haller
- Ralph Feder
- et al.
- 2019
- JES
PaperControlled Collapse Reflow for Josephson Chip Bonding
- C.-Y. Ting
- K.R. Grebe
- et al.
- 2019
- JES
PaperA Viscous Flow Model to Explain the Appearance of High Density Thermal Si02 at Low Oxidation Temperatures
- E. Tierney
- J. Angilello
- 2019
- JES
PaperAll Dry Lithography Processes and Mechanistic Studies with Poly(methacrylonitrile) and Related Polymers
- H. Hiraoka
- 2019
- JES
PaperAnodic Etching of Defects in P-Type Silicon
- H. Föll
- 2019
- JES
PaperOne-Micron Polycide (WSI2 on Poly-Si) MOSFET Technology
- M.Y. Tsai
- H.H. Chao
- et al.
- 2019
- JES
Paper