Measurement of the effective wavelength of x-ray lithography sources
- Juan R. Maldonado
- Inna Babich
- et al.
- 1993
- Microelectronic Engineering
Paper
Publications
14462 results for Physical Sciences
On the Birefringence of Multilayered Symmetric Diblock Copolymer Films
- J. Kim
- I. Chin
- et al.
- 1993
- Macromolecules
PaperElectromigration and reliability in submicron metallization and multilevel interconnection
- Thomas Kwok
- 1993
- Materials Chemistry and Physics
ReviewThe a.c. indentation technique and its applications
- T.W. Wu
- 1993
- Materials Chemistry and Physics
ReviewRecipe for high-Tc transition-metal chalcogenide superconductors
- K.Alex Müller
- 1993
- Materials Chemistry and Physics
ReviewTrapping and Behavior of Particulates in a Radio Frequency Magnetron Plasma Etching Tool
- Edward F. Patterson
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperDynamics of the Desorption of D2and H2from Cu(111)
- C.T. Rettner
- H.A. Michelsen
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperElectroluminescence and Photoluminescence from Microporous Silicon p-n Junctions
- V.P. Kesan
- E. Bassous
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperTemperature-Dependent Composition, Ordering, and Band Bending at Gap(100) Surfaces
- C.L. Lin
- L.J. Brillson
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperDensity of States and Hot Electron Effects in Ballistic Electron Emission Spectroscopy
- R. Ludeke
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paper