Publications

3606 results for Mathematical Sciences

Fabrication of dual damascene BEOL structures using a multi-level multiple exposure (MLME) scheme - Part 2. RIE-based pattern transfer and completion of dual damascene process yielding an electrically functional via chain
- - Stefan Harrer
  - John C Arnold
  - et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Conference paper
Process characterization of pitch-split resist materials for application at 16nm node
- - Steven J. Holmes
  - Cherry Tang
  - et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Conference paper
A silicon-containing resist for immersion lithography
- - Ratnam Sooriyakumaran
  - Wu-Song Huang
  - et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Conference paper
Fabrication of dual damascene BEOL structures using a Multi-Level Multiple Exposure (MLME) scheme - Part 1. Lithographic patterning
- - Dario L. Goldfarb
  - Stefan Harrer
  - et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Conference paper
Multi-level integration of patternable low-κ material into advanced Cu BEOL
- - Qinghuang Lin
  - Shyng-Tsong Chen
  - et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Conference paper
High contact angle fluorosulfonamide-based materials for immersion lithography
- - Daniel P. Sanders
  - Linda K. Sundberg
  - et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Conference paper
Direct write 3-dimensional nanopatterning using probes
- - David Pires
  - Armin Knoll
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Conference paper
Self-assembling materials for lithographic patterning: Overview, status and moving forward
- - William Hinsberg
  - Joy Cheng
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Conference paper
Polymer waveguide based multi-layer optical connector
- - D. Jubin
  - Roger F. Dangel
  - et al.
- 2010
- SPIE OPTO 2010
Conference paper
Design and implementation of an electro-optical backplane with pluggable in-plane connectors
- - Richard C.A. Pitwon
  - Ken Hopkins
  - et al.
- 2010
- SPIE OPTO 2010
Conference paper