Measuring layer-specific depth-of-focus requirements
- Bernhard Liegl
- Allen Gabor
- et al.
- 2008
- SPIE Advanced Lithography 2008
Conference paper
Publications
26883 results for Science
The comparison of OPC performance and run time for dense versus sparse solutions
- Amr Abdo
- Ian Stobert
- et al.
- 2008
- SPIE Advanced Lithography 2008
Conference paperRadiometric consistency in source specifications for lithography
- Alan E. Rosenbluth
- Jaione Tirapu Azpiroz
- et al.
- 2008
- SPIE Advanced Lithography 2008
Conference paperMonitoring polarization at 193nm high-numerical aperture with phase shift masks: Experimental results and industrial outlook
- Gregory McIntyre
- Richard Tu
- 2008
- SPIE Advanced Lithography 2008
Conference paperIBM smart surveillance system (S3): Event based video surveillance system with an open and extensible framework
- Ying-Li Tian
- Lisa Brown
- et al.
- 2008
- Machine Vision and Applications
PaperMetastable magnetism and memory effects in dilute magnetic semiconductors
- A. Ney
- R. Rajaram
- et al.
- 2008
- Journal of Physics Condensed Matter
PaperRemote profiling of resource constraints of web servers using mini-flash crowds
- Pratap Ramamurthy
- Vyas Sekar
- et al.
- 2008
- USENIX ATC 2008
Conference paperPreclinical assessment of wt GNE gene plasmid for management of hereditary inclusion body myopathy 2 (HIBM2)
- Chris Jay
- Gregory Nemunaitis
- et al.
- 2008
- Gene Regulation and Systems Biology
PaperMultiple reorderings in phrase-based machine translation
- Niyu Ge
- Abe Ittycheriah
- et al.
- 2008
- SSST 2008
Conference paperA rule-driven dynamic programming decoder for statistical MT
- 2008
- SSST 2008
Conference paper